Bosby & associates
interference microscope objectives
8ygo® New View 200/600/5000/6000/7000/8000/9000/NexView/ZeGage Interference Objectives, infinity corrected
Zygo® 1.0x, Michelson, S/N 10017 – This was on a New View 5000 but can be used on all optical profilers. It is an earlier version and cannot be turret mounted. Not tested yet.
Zygo® 2.5x, Michelson, SLWD (working distance = 40mm), S/N SL 25014 – Not tested yet.
Zygo® 5x, Michelson, SLWD (working distance = 40mm), S/N SL 05038 – Not tested yet.
Zygo® 2.5x, Michelson, LR, S/N 423233 – Measured against SiC standard = 84.6A PV and 13.3A RMS (w/cylinder removed = 4.8A RMS) – $4,500
Zygo® 2.5x, Michelson, S/N 423132 – Very dirty. Pretty sure the dirt is on reference mirror. We are not going to disassemble and clean. If you want to try, I can get this to you cheap. Contact me.
Zygo® 2.75x, Michelson, S/N 0904005 – Sq 1.08nm, Sz 6.83nm
Zygo® 2.75x, Michelson, S/N 1802011 – Sq 2.01nm, Sz 18.3nm
Zygo® 5x, Michelson, S/N 426005 – Original Zygo data = 11.1 RMS and 69.9A PV. $4,950
Zygo® 5x, Michelson, S/N 425379 – Measured against SiC standard = 6.6 RMS and 58.9A PV. This objective has some artifacts that appear to be internal, but data looks quite good. $2,950
Zygo® 5x, Michelson, S/N 426217, This objective has a pretty good size “goober”; not sure where it is but probably on the reference mirror. Measurement data is good, data is dropped in the “goober” area. Measured against SiC standard = 6.2A RMS and 85A PV. $1,950
Zygo® 10x, Mirau, S/N 1435005 – Measured at Sq 0.29nm, Sz 2.5nm – In Zygo metal box
Zygo® 10x, Mirau, S/N 1518013 – Not tested yet – In Zygo metal box
Zygo® 50x TC, Mirau, S/N 001, Zygo exterior metal housing is missing – Measured against SiC standard at 3.4A RMS – $3,950 obo
Zygo® 50x TC, Mirau, S/N I 500003 – Measured against SiC standard = 3.3A RMS – $5,950
Zygo® 50x TC, Mirau, S/N 1802125 – Measured at Sq 1.05nm – seems kind of high, retesting
Veeco 50x, Mirau, S/N 438451-7 $3,950
Veeco 50x, Mirau, S/N IX70844 $2,950
Set of 3 Starrett gauge blocks for extended scan calibration.
Zygo P/N 6300-0174-01
Let me know if you can use….cheap!
Zygo® New View 100 Interference Objectives, non-infinity corrected
Zygo® 2.5x, Michelson (25 available) $195/ea
Zygo® 5x, Michelson, S/N 950214 $200 – measured against SiC standard = 3.4A RMS
Zygo® 5x, Michelson, S/N 950202 $200 – measured against SiC standard = 3.4A RMS
Zygo® 100x Mirau S/N 110008
ADE-PST MicroXAM Objectives
50x AT (athermal), Mirau, infinity corrected
